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2024年4月12日发(作者：发卡网源码出售)

专利内容由知识产权出版社提供

专利名称：Load port and mapping processing method

in load port

发明人：三浦 辰弥

申请号：JP2017213547

申请日：20171106

公开号：JP2019087598A

公开日：20190606

专利附图：

摘要：The present invention provides a load port that contributes to the

improvement of the operation rate in semiconductor manufacturing, and a mapping

processing method in the load port by detecting mixed loading of objects to be

transported having different planar dimensions before and after an intermediate

processing step. SOLUTION: A seating and holding process for holding a transport

container (FOUP 3 or second transport container C) on a loading table 5, and a rear for

moving the transport container on the loading table 5 from a seating position to a

transport object delivery position The first mapping process, which is executed by

positioning and executing the mapper M2 at the detectable first mapping position (P1) of

the first transport target W through the opening portion 41 of the frame 4 in the pulling

process, the open state, (2) A second mapping process is performed in which the second

mapping process is performed, which is positioned at a detectable second mapping

position of the object to be transported F. [Selected figure] Figure 10

申请人：シンフォニアテクノロジー株式会社

地址：東京都港区芝大門一丁目１番３０号

国籍：JP

代理人：佐野 禎哉

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