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2024年3月12日发(作者：flashcs6时间轴特效)

专利内容由知识产权出版社提供

专利名称：Inverted merged MR head having plated

notched first pole tip and self-aligned

second pole tip

发明人：Thomas Young Chang,Jyh-Shuey Jerry Lo

申请号：US09592089

申请日：20000612

公开号：US06278591B1

公开日：20010821

专利附图：

摘要：A method makes an inverted merged MR head with a second pole tip which is

self-aligned with a top first pole tip. After forming a bottom first pole tip layer, a top first

pole tip is frame plated thereon with a width that defines a track width of the merged MR

head. A photoresist layer, which is employed in the frame plating of the top first pole tip,

is then soft baked which causes a photoresist opening above the top first pole tip to have

sloping side edges which form a recess. An electrically-conductive sacrificial layer, such as

copper, is then plated into the recess on top of the top first pole tip and the photoresist

is removed. A forming layer, such as alumina, is then deposited and lapped so that the

forming layer and the sacrificial layer have top surfaces that are flush with respect to one

another. The sacrificial layer is then removed by an etchant that will not attack the

materials of the pole tips and the forming layer. The forming layer now has a recess with

sloping edges into which a gap layer, a seedlayer and a second pole tip layer are

deposited. By this method the second pole tip is self-aligned with the top first pole tip

with the second pole tip having a bottom that is substantially the same width as the top

of the top first pole tip.

申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION

代理人：Ervin F. Johnston

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