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2024年12月27日发(作者：设置div中的内容循环滚动)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE TRANSFER CONTAINER,

OPENING/CLOSING APPARATUS FOR

SUBSTRATE TRANSFER CONTAINER, AND

METHOD FOR STORING SUBSTRATE

发明人：SAGA KOICHIRO,嵯峨 幸一郎

申请号：JP特願2001-27666(P2001-27666)

申请日：20010205

公开号：JP特開2002-231803(P2002-231803A)A

公开日：20020816

专利附图：

摘要：PROBLEM TO BE SOLVED: To provide a substrate transfer container of a vacuum

sealing type, which is compatible with a SMIF pod and can open by using a common

opening/closing apparatus. SOLUTION: The substrate transfer container of a vacuum

sealing type, which has a container body 2, shaped like a box which one side is open, and a

base lid 3, vacuum-sucked to the container body 2 in a blocking state of an opening of the

container body 2, comprises a vacuum suction release valve 34, which is composed of an

opening/closing chamber 35 provided in the base lid 3 in a communicating state to a

vacuum groove 33, being a vacuum suction portion with the container main body 3, a

punched hole 36 provided so as to communicate to the opening/closing chamber 35 from

a surface formed outside the base lid 3 in a blocking state of the container body 2, and an

opening/closing valve member 42 for blocking the punched hole 36 in a pressed state

against an inner wall of the opening/closing chamber 35 by means of an elastic body 41.

申请人：SONY CORP,ソニー株式会社

地址：東京都品川区北品川6丁目7番35号

国籍：JP

代理人：船橋 國則

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