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2024年12月27日发(作者：ps扩展功能用不了)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE-PROCESSING TABLE AND

SUBSTRATE PROCESSING DEVICE

发明人：SOYAMA, Masanobu, Mitsuboshi Diamond

Ind. Co., Ltd

申请号：EP04713253.5

申请日：20040220

公开号：EP1598163A1

公开日：20051123

专利附图：

摘要：A substrate processing table is constituted, in layer form, of a first sub-table, a

second sub-table, a rubber plate and a metal plate. A plurality of substrate adsorbing

holes are provided which penetrate through the sub-tables, the rubber plate and the

metal plate to suck the substrate. Further, a plurality of hard-sheet adsorbing holes are

provided which penetrate through the second sub-table and the rubber plate to suck the

metal plate. At the time of fixing the substrate, air is discharged via a cavity portion

formed on the lower side of the second sub-table, and the pressure of each of the

adsorbing holes is made negative. With such a configuration, it is possible to improve a

method for holding a substrate so as to improve a scribe function in a scribe step and a

break function in a break step at the time of dividing the substrate.

申请人：Mitsuboshi Diamond Industrial Co., Ltd.

地址：2-12-12 Minami-Kaneden Suita-city, Osaka Pref. 564-0044 JP

国籍：JP

代理机构：Tiedtke, Harro

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