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2024年12月28日发(作者：proxy代理设置)

专利内容由知识产权出版社提供

专利名称：DETECTION OF ALIGNMENT MARK

发明人：KATO YOSHIHIDE,SUZUKI TAKASHI

申请号：JP13792285

申请日：19850626

公开号：JPS61296715A

公开日：19861227

摘要：PURPOSE:To detect alignment marks consisting of a main mark and sub-marks

easily and securely by a method wherein allowable discrepancy of alignment mark

patterns on an object substrate and allowable discrepancy accompanying mechanical

alignment are provided with sufficiently practical margin. CONSTITUTION:The scanning

start position of a scanning 2, by which a main mark 61 is detected, and the main mark

detecting position (a cross point of the main mark 61 and the scanning line) are

memorized. The scanning start position of a scanning 3 is determined so as to have a

certain distance (for instance a pitch P) from the scanning 2 along the direction making a

right angle with the scanning line, i.e. longitudinal direction of the main mark 61, and the

scanning 3 is performed to find the second main mark detecting position and the

scanning start position and the main mark detecting position of the scanning 3 are

memorized. By repeating these performances, scanning start positions and main mark

detecting positions corresponding to the scannings 2 through 7 are memorized. Finally,

when a scanning 8 is performed, the main mark is not detected any more so that it can be

detected that the end part of the main mark 61 exists in a region between the scanning 8

and the scanning 7 immediately before.

申请人：TOSHIBA CORP

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