admin 管理员组

文章数量: 1086019


2024年12月28日发(作者：php limit)

专利内容由知识产权出版社提供

专利名称：Substrate processing pallet and related

substrate processing method and machine

发明人：Martin P. Klein,David Felsenthal,Piero

Sferlazzo

申请号：US09917224

申请日：20010727

公开号：US06821912B2

公开日：20041123

专利附图：

摘要：A substrate processing pallet has a top surface and a plurality of side surfaces.

The top surface has at least one recess adapted to receive a substrate. The recess

includes a support structure adapted to contact a portion of a substrate seated in the

recess and a plurality of apertures each adapted to accommodate a lift pin. Lift pins can

extend through the apertures initially to support the substrate and retract to deposit

the substrate onto the support structure. A side surface includes a process positioning

feature adapted to engage with a feature located in a process chamber to position the

pallet. A side surface includes a positioning feature adapted to engage with an end

effector alignment feature to position the pallet with respect to the end effector during

transport. A side surface includes support features adapted to engage with end effector

support features to support the pallet during transport.

申请人：NEXX SYSTEMS PACKAGING, LLC

代理机构：Proskauer Rose LLP

更多信息请下载全文后查看


本文标签： 专利 知识产权 出版社 内容 全文

版权声明：本文标题：Substrate processing pallet and related substrate 内容由网友自发贡献，该文观点仅代表作者本人， 转载请联系作者并注明出处：http://www.roclinux.cn/p/1735413980a1660826.html， 本站仅提供信息存储空间服务，不拥有所有权，不承担相关法律责任。如发现本站有涉嫌抄袭侵权/违法违规的内容，一经查实，本站将立刻删除。