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2024年12月28日发(作者：原码反码补码递增碱性)

专利内容由知识产权出版社提供

专利名称：Through

发明人：灘 本 信 成,関 口 健,太 田 啓 吾,清 水 敏

申请号：JP2003095332

申请日：20030331

公开号：JP4377605B2

公开日：20091202

摘要：

PROBLEM TO BE SOLVED: To provide a substrate on which a plurality of optical

elements are formed by exposure in plurality of shots and the positional relationship

among the optical elements can be stably obtained with high accuracy, and to provide an

exposure method to realize the above described substrate.

SOLUTION: The exposure method includes: a process of disposing a substrate in a

first exposure position; a first exposure process to form a first optical element and a first

position indicating pattern on the substrate; and further, a process of disposing the

substrate in a second exposure position; and a second exposure process to form a

second optical element and a second position indicating pattern on the substrate. The

first position indicating pattern and the second position indicating pattern are formed to

correspond to each other, and the distance between these patterns indicates the relative

position of the first optical element and the second optical element with respect to the

X, Y and θ directions.

COPYRIGHT: (C)2005,JPO&NCIPI

申请人：大日本印刷株式会社

地址：東京都新宿区市谷加賀町一丁目１番１号

国籍：JP

代理人：吉武 賢次,永井 浩之,岡田 淳平,勝沼 宏仁

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