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2024年12月28日发(作者：好看网站模板带手机端)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE FIXTURE

发明人：HARMS, Michael, R.,FOSS, Richard, J.,TRICE,

Jennifer, L.,NEAVIN, Terence, D.

申请号：US1996013206

申请日：19960812

公开号：WO97/009462P1

公开日：19970313

摘要：The fixture comprising a first plate (12), a second plate (14) for supporting the

substrate (22) during deposition of the material over the substrate, the substrate being

supported on a side of the second plate opposite the first plate, a plurality of

thermoelectric devices (30) disposed between the first plate and the second plate, the

thermoelectric devices being in thermal communication with both the first plate and the

second plate, and a device for controlling each of the thermoelectric devices to generate

thermal energy sufficient to substantially maintain a desired temperature of the

substrate during deposition of the material over the substrate, wherein a portion of the

thermal energy is transferred to the substrate by the second plate and a portion of the

thermal energy is transferred away from the thermoelectric devices by the first plate.

申请人：MINNESOTA MINING AND MANUFACTURING COMPANY

地址：US

国籍：US

代理机构：MINNESOTA MINING AND MANUFACTURING COMPANY,VOSSIUS +

PARTNER

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