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2024年12月28日发(作者：xor的意思)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE DETECTING APPARATUS AND

SUBSTRATE TRANSFER APPARATUS

发明人：YAGI, Shuzo,NAKANE, Masao,ISOBATA,

Yoshinori

申请号：JP2009000115

申请日：20090114

公开号：WO09/096142P1

公开日：20090806

摘要：Provided are a substrate detecting apparatus and a substrate transfer

apparatus which improve degree of freedom in installation layout. The substrate

detecting apparatus is composed of a projector (41), a light receiver (42), and a detecting

section (controller (15)). The projector projects inspection light (40) so that the light

passes through a prescribed position on a passage of a substrate (4) transferred by a

transfer belt (26). The light receiver receives inspection light (40) projected from the

projector (41), and the detecting section (controller) detects that the substrate (4)

transferred by the transfer belt (26) has reached the prescribed position, based on

reduction of the quantity of the inspection light (40) received by the light receiver (42)

when the substrate (4) reaches the prescribed position and a part of the inspection light

(40) is blocked by the substrate (4). The inspection light (40) is projected from the

projector (41) in the direction orthogonally intersecting with the transfer direction of the

substrate (4) which is transferred by the transfer belt (26) and in a state where the upper

surface and the lower surface of the transfer belt (26) are included in an optical path. The

light receiver (42) receives the inspection light passed through the upper and the lower

regions of the transfer belt (26) in the width direction.

申请人：YAGI, Shuzo,NAKANE, Masao,ISOBATA, Yoshinori

地址：1006, Oaza Kadoma, Kadoma-shi, Osaka 5718501 JP

国籍：JP

代理机构：OGURI, Shohei

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