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2024年12月28日发(作者：excel怎么拟合函数)
专利内容由知识产权出版社提供
专利名称：Substrate treatment system
发明人：Kitano, Junichi, c/o Tokyo Electron
Limited,Katano, Takayuki, c/o Tokyo
Electron Limited,Kanzawa, Keiko, c/o Tokyo
Electron Limited,Akimoto, Masami, c/o
Tokyo Electron Limited,Semba, Norio, c/o
Tokyo Electron Limited
申请号：EP97114632.9
申请日：19970823
公开号：EP0827186A2
公开日：19980304
专利附图：
摘要：A substrate treatment system for treating a substrate under an air-conditioned
environment comprises process sections (11, 220) provided with at least either of liquid
treatment system units (G1, G2, 171, 172, 241 to 244) and heat treatment system units
(G3, G4, 245-248), an upper spaces (62, 262) formed above the process sections in order
to supply air to the process sections, purification sections (80, 281, 281A) for removing
alkaline components from the air to be supplied to the upper spaces to purify the air,
temperature and humidity control sections (140, 301) communicating with the purification
sections and the upper spaces to control the temperature and humidity of the air passing
through the purification sections, and fans (151, 152, 174, 184, 263, 307) for supplying air
to the upper spaces from the temperature and humidity control sections, lowering the
air from the upper spaces into the process sections, and supplying at least some of the
air lowering through the process sections to the temperature and humidity control
sections. The purification sections (80, 281, 281A) are provided with chambers (81, 282)
communicating with a clean room, air replenishment means (82, 109, 151, 283A, 307) for
introducing a supplementary air into the chambers from the clean room, nozzles (92, 102,
106, 108, 285) for spraying demineralized water into the chambers, gas-liquid contact
sections (90, 100, 298, 299) formed in the chambers in order to bring the sprayed
demineralized water into contact with the introduced supplementary air, and mist trap
mechanisms (91, 94, 101, 104, 291) arranged at the downstream side of the gas-liquid
contact sections to capture the mist-like demineralized water in the air passing through
the gas-liquid contact sections.
申请人：TOKYO ELECTRON LIMITED
地址：3-6 Akasaka 5-chome Minato-ku, Tokyo 107 JP
国籍：JP
代理机构：Gramm, Werner, Prof. Dipl.-Ing.
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