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2024年12月28日发(作者：win10句柄无效)

专利内容由知识产权出版社提供

专利名称：Substrate, substrate holding apparatus,

analysis apparatus, program, detection

system, semiconductor device, display

apparatus, and semiconductor

manufacturing apparatus

发明人：Yuji Furumura,Naomi Mura,Koki

Tamagawa,Tadayoshi Yoshikawa,Hiroshi

Yonekura

申请号：US12592219

申请日：20091119

公开号：US08686743B2

公开日：20140401

专利附图：

摘要：A substrate including a sensor unit, wherein the sensor unit includes a coil

wound at least once arranged on the surface of the sensor or embedded within and near

the surface thereof. With such an arrangement, an electric current that corresponds to

information with respect to the substrate (e.g., the temperature of the substrate or the

amount of charge stored in the substrate) flows through the coil.

申请人：Yuji Furumura,Naomi Mura,Koki Tamagawa,Tadayoshi Yoshikawa,Hiroshi

Yonekura

地址：Kanagawa JP,Tokyo JP,Nagano JP,Nagano JP,Nagano JP

国籍：JP,JP,JP,JP,JP

代理机构：Edwards Wildman Palmer LLP

代理人：Jeffrey D. Hsi,Jonathan P. Western

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