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2024年12月28日发(作者：直销源码下载)

专利内容由知识产权出版社提供

专利名称：Substrate-processing apparatus

发明人：Masatoshi Kaneda,Masami

Akimoto,Nobuyuki Jinnai

申请号：US09916342

申请日：20010730

公开号：US2A1

公开日：20020207

专利附图：

摘要：A substrate-processing apparatus comprising a processing chamber in which a

substrate is processed, an air-supplying device for supplying air having controlled

temperature and humidity into the processing chamber, an air passage having an inlet

port and an outlet port connected to the processing chamber, for guiding the air from

the inlet port to the outlet port, a cooling/dehumidifying section arranged in the air

passage and having a thermoelectric cooling device, for cooling and dehumidifying the air

introduced from the inlet port, a heating section arranged in the air passage, for heating

the air that has been cooled and dehumidified by the cooling/dehumidifying section, a

humidifying section provided in the air passage, for humidifying the air heated by the

heating section and guiding the air to the outlet port, a temperature-humidity sensor

provided at a position in the air passage, and a control device for controlling the

cooling/dehumidifying section, the heating section and the humidifying section, in

accordance with temperature and humidity detected at the position in the air passage,

thereby to adjust the temperature and humidity of the air to be supplied from the outlet

port.

申请人：KANEDA MASATOSHI,AKIMOTO MASAMI,JINNAI NOBUYUKI

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