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2024年12月28日发(作者：goto语句使用)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE CONTROL DEVICE, SUBSTRATE

STORING CONTAINER, SUBSTRATE STORING

DEVICE, AND DEVICE MANUFACTURE

发明人：MATSUMOTO TAKESHI,松本 健,NAKAHARA

TAKASHI,中原 隆

申请号：JP特願平9-236440

申请日：19970819

公开号：JP特開平11-65093A

公开日：19990305

专利附图：

摘要：PROBLEM TO BE SOLVED: To improve reliability and efficiency in a substrate

processing technology, by reading information recorded on an end face of a substrate.

SOLUTION: A bar code 31 having information related to a substrate (reticule), such as a

reticule and a wafer, is marked on an end face of the reticule 1 and an optically

transparent side-surface transmissive window 43 is provided in a side surface of a storing

container. Accordingly, the bar code 31 can be read by a bar-code reading device 53

through the side-surface transmissive window 43 even in a state that one reticule 1 is

stored in one cassette and that a plurality of such cassettes are piled up vertically.

Similarly, a bar code of a reticule 1 stored in an arbitrary reticule cassette 2 can be read

by moving the bar-code reading device 53 vertically relatively against respective reticule

cassettes 2. Also, not only optical recording codes but also magnetic recording codes

and reading devices can be used.

申请人：CANON INC,キヤノン株式会社

地址：東京都大田区下丸子3丁目30番2号

国籍：JP

代理人：伊東 哲也 (外2名)

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