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2024年12月28日发(作者：北京电脑培训学校机构哪家哪个好)

专利内容由知识产权出版社提供

专利名称：SUBSTRATE TRANSFER APPARATUS,

SUBSTRATE TRANSFER MODULE,

SUBSTRATE TRANSFER METHOD AND

COMPUTER READABLE STORAGE MEDIUM

发明人：KONDOH, Keisuke

申请号：JP2008055138

申请日：20080319

公开号：WO08/117727P1

公开日：20081002

摘要：Disclosed is a substrate transfer apparatus having a joint-type transfer arm

wherein an arm section is turnably connected to a holding section which holds a

substrate. The substrate transfer apparatus is provided with a heating section configured

to heat the arm section, a temperature detecting section for detecting the temperature

of the arm section; and a control section, which makes the heating section heat the arm

section prior to starting substrate transfer, permits the substrate to be transferred after

the temperature detection value obtained from the temperature detecting section is

increased to a set temperature range previously set, then controls the heating section so

that the temperature detection value is maintained within the set temperature range.

申请人：KONDOH, Keisuke

地址：3-1, Akasaka 5-Chome, Minato-Ku, Tokyo 1076325 JP,c/o TOKYO ELECTRON AT

LIMITED, 2381-1, Kitagejo, Fujii-Cho, Nirasaki-Shi, Yamanashi 4078511 JP

国籍：JP,JP

代理机构：ITOH, Tadahiko

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