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2024年12月28日发(作者：ascii码怎么转换16进制)

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专利名称：Substrate coated with at least a MgO-layer

发明人：STOLLENWERK, JOHANNES, DR.,DAUBE,

CHRISTOPH, DR.,GUERKE, ACHIM

申请号：EP97120354.2

申请日：19971120

公开号：EP0918042A1

公开日：19990526

专利附图：

摘要：A substrate of size at least 100x100 mm, with an MgO layer which exhibits one

or more predominant peaks in the &thetas; -2&thetas; method measurement trace, is

new. Independent claims are also included for (i) production of the above substrate by

passing a process gas through the gap between two sputter targets of ≥ 99% purity Mg

and feeding oxygen to the region between the gap end and a temperature-controlled

substrate; and (ii) a coating system for carrying out the above process. Preferred Feature:

The MgO layer has a single predominant peak which is a (200), a (220) and/or especially a

(111) peak.

申请人：BALZERS HOCHVAKUUM AG

地址：9477 Trübbach CH

国籍：CH

代理机构：Troesch Scheidegger Werner AG

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