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Find the Headway Research PWM32-PS-CB15 at our website:
Click HERE
Headway Spin Coater Instruction Manual
Roger Robbins 6/21/2007
The University of Texas at Dallas
Erik Jonsson School of Engineering
DOCUMENT TITLE:
Headway Spin Coater Instruction Manual
AUTHOR:
Roger Robbins
DOCUMENT NUMBER:
SP2007-LI-001
Page 1 of
7
6/21/2007
Headway Spin Coater Instruction Manual
Roger Robbins 6/21/2007
Table of Contents
Headway Spin Coater 2
Table 2
3
3
Sign .4
4
Programming 5
5
6
7
.7
DOCUMENT TITLE:
Headway Spin Coater Instruction Manual
AUTHOR:
Roger Robbins
DOCUMENT NUMBER:
SP2007-LI-001
Page 2 of
7
6/21/2007
Headway Spin Coater Instruction Manual
Roger Robbins 6/21/2007
Introduction
The Headway Spinner enclosed in a stainless steel solvent hood was donated by
TI to the UTD Clean Room. This manual spinner has a new controller, the Headway
model PWM32, which allows a bit of programming similar to our new CEE spinner. We
can use the Headway for small samples because it has facilities more amenable to tiny
samples. It will be mandatory to clean this bowl after your job is complete. This
paper describes how to program and use the system.
Description
The spinner system consists of a stainless steel solvent hood, a spin chuck on a
motor shaft in the base of the hood deck, a motor controller sitting on top of the hood
(out of solvent fumes), and a foot switch to start the spin cycle for coating. This system
is labeled in Figure 1.
Headway Spinner Controller
Spin Bowl
Air Gun
Foot Switchshowing red and green circles
Figure 1. Headway Spinner enclosed in a SS Solvent Hood.
DOCUMENT TITLE:
Headway Spin Coater Instruction Manual
AUTHOR:
Roger Robbins
DOCUMENT NUMBER:
SP2007-LI-001
Page 3 of
7
6/21/2007
The spinner can accommodate sample sizes from about 1 to 8 inches. Anything
smaller than an inch must use a spin chuck with Kapton tape covering the vacuum rings
and one hole punched in the center of the Kapton to vacuum clamp the sample. This
will prevent resist from sucking down the vacuum port in the chuck and gumming up the
works. The spin motor can be programmed to ramp up and down for resist spreading
and safe stopping. If there is an excess of solvent or resist, there are two holes in the
bottom of the bowl that drain into two solvent containers below the deck. Unlike a toilet,
the lid over the spin bowl is interlocked to prevent spinning with the lid up. Figure 2
shows the spin bowl with a photomask mounted on a spin chuck.
Spin Bowl
Resist/Solvent Drain holes
Spin Bowl Lid
Spin Bowl Lid Latch (Interlocked)
Figure 2. Spin Bowl with photomask on spin chuck.
The spin chucks are attached to the motor shaft via a D-shaped shaft and D-
shaped hole in the bottom of the chuck socket with a small o-ring in it to seal the vacuum
in. Note that the chuck surface must be completely clean before attempting to vacuum
clamp a sample for spinning. This is extremely important to prevent samples from flying
off at potentially high speeds and possibly causing injury. This spin motor can
accelerate at 20,000 rpm/sec which can impart a rather high force to the wafer.
Sign the Logbook
When you approach the spinner for a job, the first thing that you do is sign the
logbook. Violators of this policy will be prosecuted to the fullest extent of the law.
Substrate Centering
This is a manual spinner requiring manual centering of substrates. If the
substrate is off-center too much, it will exert a centrifugal force on the vacuum chuck and
attempt to fly off on its own. We will include a program named “0” that will spin the
chuck at about 200 rpm for maybe 5 seconds as a test of centering. If the substrate
wobbles more than ¼ inch, recenter the substrate and test it again. Repeat until the
substrate spins at center. Do not change program #0; user programs will start at #1.
DOCUMENT TITLE:
Headway Spin Coater Instruction Manual
AUTHOR:
Roger Robbins
DOCUMENT NUMBER:
SP2007-LI-001
Page 4 of
7
6/21/2007
Programming the Controller
General
The Headway Model PWM32 controller is programmed via the membrane keys
on the face of the controller, Figure 3. A recipe (identified by a number 0-9) consists of a
sequence of steps. Steps inside a recipe are also identified with a number (0-9). This
means that there are 10 possible programs with a maximum of 10 steps in each. Once
a program step has been entered, it cannot be erased. If you need to erase an
individual step, then you have to erase the entire program and start over. Any step
underway can be immediately terminated by stepping on the red circle of the foot switch.
Note also that the timer does not start until the spin chuck has ramped to its stable
assigned speed. Also during development of a program, the programmer can
temporarily alter the speed of the chuck by pressing the membrane keys across from the
up and down speed arrows in the lower right of the keypad. In general, a program step
must be terminated by something, usually time, but could be set to some other event,
such as spinning chuck reaching zero velocity, or manual termination, etc.
In the LCD display you can see the status of the controller: Current recipe
number in the format of (current step - of – total steps), time, State (Ready, Review,
Running, and Programming, Abort), vacuum mode (AU – Auto, MN – Manual), and a
strange code in the last line.
LCD Display
Keypad
Off/On Switch
Figure 3. Headway Model PWM32 Controller
DOCUMENT TITLE:
Headway Spin Coater Instruction Manual
AUTHOR:
Roger Robbins
DOCUMENT NUMBER:
SP2007-LI-001
Page 5 of
7
6/21/2007
Programming Details
Programming is rather simple and consists of setting a program number, adding
steps and setting the step terminator. It is a good idea to write down your program
before “winging” it on the controller keyboard since you cannot erase a step.
Simple programs consist of parameters like speed (rpm), ramp acceleration
(rpm/sec), spin time (sec), and ramp deceleration (rpm/sec). You may have several
steps such as a resist spreading spin, a full speed spin to dry the resist, and a
deceleration-to-zero step for program termination. The following example of
programming will include three steps – use your own values instead of the ones I have
listed in the example.
• Enter the program number:
o Press “Recipe”
o Press a number key to label the program
o If you want to erase a program, press “Recipe”, then “Clear” and then the
Recipe number.
• Select Step 1:
o Press “Step”
o Press a number key to indicate the step you are programming - 1
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