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2024年12月29日发(作者:mysql高级查询语句总结)

半导体:semiconductior

元素半导体:elemental semiconductor

化合物半导体:compound semiconductor

导电类型:conductivity type

N-型半导体:n-type semiconductor

P-型半导体:p-type semiconductor

空穴:hole

受主:accepter

施主:donor

载流子:carrier

载流子浓度:carrier concentration

多数载流子:majority carrier

少数载流子:minority carrier

杂质浓度:impurity concentration

深能级杂质:deep- level impurity

复合中心:recombination center

补偿:compensation

耗尽层:depletion layer

红外吸收光谱:infrared absorption spectrum

红外吸收系数:infrared absorption coefficient

电阻率(体):resistivity(bulk)

电导率:conductivity

电阻率允许偏差:allowable resistivity tolerance

径向电阻率变化:radial resistivity vsriation

薄层电阻:sheet resistance

扩展电阻:spreading resistance

二探针:two point probe

四探针:four point probe

迁移率:mobility

霍尔效应:hall effect

霍尔系数:hall coefficient

霍尔迁移率: hall mobility

寿命:lifetime

各向异性:anisotropic

结晶学表示法:crytallographic notation

密勒指数:miller indices

劳埃法:laue method

晶向:crystallographic direction

晶面:crystallographic plane

取向偏离:off-orientation

正向晶向偏离:orthogonal misorientation

主参考面:primary flat

副参考:secondary flat

解理面:cleavage plan

外延面:epitaxial layer

扩散:diffused layer

埋层:buried layer

薄层边界:layer boundary

界面:interface

p-n 结:p-n junction

双极型器件:bipolar devices

集成电路:integrated circuit

晶体:crystal

晶锭:ingot

多晶半导体:polycrystalline semiconductor

孪晶:twinned crystal

单晶:single crysal

无位错单晶:zero D sigle crystal

衬底:substrate

化学气相沉积:chemical vapor deposition(CVD)

外延:epitaxy

气相外延:vapor phase epitaxy(VPE)

液相外延:liquid phase epitaxy(LPE)

分子束外延:molecular beam epitaxy(MBE)

同质外延:homoepitaxy

异质外延:heteroepitaxy

溅射法:sputtering method

掺杂:doping

重掺杂:heavy doping

离子注入:ion implanation

自掺杂:autodoping

补偿掺杂:compensation doping

中子嬗变掺杂:neutron transmutation doping(NTD)

掺杂剂:dopant

直拉法:vertical pulling method(Czochralski growth)(CZ)

悬浮区熔法:floating zone method(FZ)

水平法:horizontal crysal growth method

磁场拉晶法:magnetic field Czochralski growth(MCZ)

吸除:gettering

切割:cutting

研磨:lapping

腐蚀:etching

各向同性腐蚀:isotropic etching

各向异性腐蚀:anisotropic etching

择优腐蚀:preferentical etching

化学机械抛光:Chem-Mech polishing

抛光面:polished surface

正面:front side

背面:back side

晶片:slice

掺杂片:doping wafer

直径:diameter

厚度:thickness

晶片厚度:thickness of slices

厚度允许偏差:allowable thickness tolerance

总厚度变化:total thickness varistion(TTV)

中心面:median surface

弯曲度:bow

翘曲度:warp

平整度:flatness

固定优质区:fixed quality area(FQA)

线性厚度变化:linear thickness variation(LTV)

非线性厚度变化:nonlinear thickness variation(NTV)

边缘凸起:edge crown

倒角:edge rounding

崩边:chip

缺口:indent

刀痕:saw marks

退刀痕:saw exit marks

划道:scratch

重划道:macroscratch

轻划道:microscratch

沟槽:groove

波纹:waves

凹坑:dimple

探针损伤:probe damage

残留机械损伤:residual mechanical damage

亮点:bright point

嵌入磨料颗粒:imbedded abrasive grain

裂纹: crack

裂痕:fracture

晶体缺陷:crystal defect

块状结构:block structure

点缺陷:point defect

位错:dislocation

位错腐蚀坑:dislocation density

堆垛层错:stacking fault

层错:fault

氧化层错:oxidation induced stacking fault(OSF)

滑移:sllip

滑移线:slip line

晶粒晶界: grain boundary

小角晶界:low-angle grain boundary

位错排:dislocation array

系属结构:lineage

星形结构:star structure

夹杂:inclusion

微缺陷:microdefect

沉淀物:precipitates

杂质富集:impurity concentrating

管道:piping

六角网络:turret network

杂质条纹:striation

漩涡:swirl

电阻率条纹:resistivity striation

温度圈:temperature circle

氧化层夹:oxide lamella

雾:haze

桔皮:oringe peel

小丘:mound

棱锥:pyramid

订:spike

沾污:contaminant

污物:dirt

痕迹:mark

污迹:smudge

夹痕:chuck mark

微粒:particulate

溶剂残留物:solvent residue

蜡残留物:wax residue

斑点:spot

色斑:stain


本文标签: 外延 结构 厚度 变化 查询