admin 管理员组

文章数量: 1086019


2024年12月29日发(作者:java查看类型的方法)

简述双极型集成电路的工艺流程

英文回答:

Bipolar Integrated Circuit Fabrication Process.

The fabrication process of bipolar integrated circuits

involves several key steps, including:

1. Substrate Preparation: The process begins with

preparing the silicon substrate by cleaning and oxidizing

it to form a thin layer of silicon dioxide (SiO2).

2. Epitaxial Layer Formation: An epitaxial layer of

silicon is deposited on the substrate to create a region

with controlled electrical properties suitable for

transistors.

3. Isolation Diffusion: Boron or phosphorus ions are

diffused into the substrate to create isolation regions,

separating different components of the circuit.

4. Base Diffusion: Boron or phosphorus ions are

diffused into selected regions to form the transistor base

regions.

5. Emitter Diffusion: Phosphorus or arsenic ions are

diffused into the base regions to form the transistor

emitter regions.

6. Contact Formation: Metal contacts are deposited and

patterned to connect the different components of the

circuit.

7. Passivation: A layer of silicon nitride or polyimide

is deposited to protect the circuit from external

contaminants.

8. Packaging: The circuit is encapsulated in a

protective package to provide mechanical and environmental

protection.

中文回答:

双极型集成电路的工艺流程。

双极型集成电路的制作工艺流程包含以下几个主要步骤:

1. 衬底制备,工艺开始于通过清洁和氧化硅衬底,形成一层薄

的二氧化硅 (SiO2) 层来制备衬底。

2. 外延层形成,在衬底上沉积硅的外延层,以创建具有适合晶

体管的受控电气特性的区域。

3. 隔离扩散,将硼或磷离子扩散到衬底中以创建隔离区域,将

电路的不同组件分开。

4. 基极扩散,将硼或磷离子扩散到选定的区域中,以形成晶体

管基极区域。

5. 发射极扩散,将磷或砷离子扩散到基极区域中,以形成晶体

管发射极区域。

6. 接触形成,沉积和图案化金属触点以连接电路的不同组件。

7. 钝化,沉积一层氮化硅或聚酰亚胺以保护电路免受外部污染

物的影响。

8. 封装,电路封装在保护性封装中以提供机械和环境保护。


本文标签: 区域 电路 衬底 形成 封装