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2024年12月29日发(作者：composers是什么意思)

专利内容由知识产权出版社提供

专利名称：ALUMINA SUBSTRATE

发明人：YAMASAWA Kazuhito,山沢　和人,OHIDO

Atsushi,大井戸　敦,KAWASAKI Katsumi,川崎　

克己

申请号：JP2016/056431

申请日：20160302

公开号：WO2016/152422A1

公开日：20160929

专利附图：

摘要：Provided is an alumina substrate on which an AlN layer is formed and that

causes less warping. Also provided is a substrate material that has a level of strength

enabling it to withstand normal handling when an AlN crystal or the like is grown on the

substrate, and that prevents cracking and fracturing of a grown crystal when excessive

stress is applied thereto during growing or cooling. The substrate is an alumina substrate

having an AlN layer formed on the surface, and having a gap and a rare earth element-

containing region inside the AlN layer or at the interface between the AlN layer and the

alumina substrate. Warping of the AlN layer can be reduced as a result of lattice-

mismatch stress being concentrated at the rare earth element-containing region and

releasing of stress by the gap. In addition, the rare earth element-containing region

having a concentrating of stress, and the gap having a low mechanical strength, can

induce initiation and propagation of cracks and fractures. As a result, contamination of

cracks and fractures into the crystal grown on the substrate can be prevented.

Furthermore, the rare earth element-containing region can ensure a level of mechanical

strength sufficient for handling.

申请人：TDK CORPORATION,ＴＤＫ株式会社

地址：〒1080023 JP,〒1080023 JP

国籍：JP,JP

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